4Point Probe System（2000N）

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Introduction

Specification

Accessory

Documents

The SR2000N and SR2000N-PV is a fully automatic system to measure Sheet Resistance and Resistivity of Silicon Wafer. This system can be operated by itself, furthermore, perfect remote control is available using a PC and exclusive software, and it gives various data analyses.

Utility requirements
	Power requirements (1 Line)
	- Line voltage : AC 100 ~ 220V ± 10% - Electric power : 40 W, 500 mA - Line frequency : 50 / 60 Hz
	Stage chuck vacuum requirements (1 Line)
	- Vacuum : About 200mmHg (1 Line) - Vacuum hose : Urethane 4mm
Outside Dimension
	SR2000N : 254mm(W)×562mm(D)×250mm(H) SR2000N-PV : 270mm(W)×610mm(D)×280mm(H)
Operating environment
	Temperature range : 23° ± 1°C
	Relative humidity : 30 % ∼ 70 %
	Avoid placing the system near a source of RFI, vibration and sources of gas.
	Avoid large changes in temperature.